Plasma Etching

Oxygen plasma etching of carbon nano-structures containing nitrogen

Materials Engineering / Field emission / Non crystalline solids / Nitrogen / Plasma Etching / Nickel / Non / Silicon Wafer / Room Temperature / Ion Beam / Raman Spectra / Ion Beam Assisted Deposition / Nickel / Non / Silicon Wafer / Room Temperature / Ion Beam / Raman Spectra / Ion Beam Assisted Deposition

Oxygen plasma-treated gold nanoparticle-based field-effect devices as transducer structures for bio-chemical sensing

Analytical Chemistry / Gold nanoparticle / Plasma Etching / Glucose Oxidase

Silicon nanowires based resistors as gas sensors

Materials Engineering / Analytical Chemistry / Nanowires / Gold nanoparticle / Gas Sensor / Plasma Etching / Bottom Up / Top Down / Plasma Etching / Bottom Up / Top Down

Silicon nanowires based resistors as gas sensors

Materials Engineering / Analytical Chemistry / Nanowires / Gold nanoparticle / Gas Sensor / Plasma Etching / Bottom Up / Top Down / Plasma Etching / Bottom Up / Top Down

Low resistance Ti/Al/Au ohmic backside contacts to nonpolar m-plane n-GaN (Semiconductor technology)

Doping / Annealing / OR / Plasma Etching / Vacancy / Contact Resistance / Inductively Coupled Plasma / Ohmic Contact / Lapping / Polishing / Electrical And Electronic Engineering / Electronics Letters / Contact Resistance / Inductively Coupled Plasma / Ohmic Contact / Lapping / Polishing / Electrical And Electronic Engineering / Electronics Letters

N2O plasma etching of polyimides

Materials Engineering / Kinetics / Mechanism / Vacuum / Plasma Etching

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